Abstract:Direct writing utilizing a focused electron beam constitutes an interesting alternative to resist-based techniques, as it allows for precise and flexible growth onto any conductive substrate in a single-step process. One important challenge, however, is the identification of appropriate precursors which allow for deposition of the material of choice, e.g., for envisaged applications in nano-optics. In this regard the coinage metal silver is of particular interest since it shows a relatively high plasma frequency and, thus, excellent plasmonic properties in the visible range. By utilizing the precursor compound AgO2Me2Bu, direct writing of silver-based nanostructures via local electron beam induced deposition could be realized for the first time. Interestingly, the silver deposition was strongly dependent on electron dose; at low doses of 30 nC/μm2 a dominant formation of pure silver crystals was observed, while at higher electron doses around 104 nC/μm2 large carbon contents were measured. A scheme for the enhanced silver deposition under low electron fluxes by an electronic activation of precursor dissociation below thermal CVD temperature is proposed and validated using material characterization techniques. Finally, the knowledge gained was employed to fabricate well-defined two-dimensional deposits with maximized silver content approaching 75 at. %, which was achieved by proper adjustment of the deposition parameters. The corresponding deposits consist of plasmonically active silver crystallites and demonstrate a pronounced Raman signal enhancement of the carbonaceous matrix.

In-situ synthesis of Ag nanoparticles by electron beam irradiation

Seed-mediated synthesis of silver nanocrystals with controlled sizes and shapes in droplet microreactors separated by air.

In Situ Fabrication of Silver-Based Nanostructures Using Electron Beam

Electron Beam Induced Growth of Silver Nanoparticles

In Situ Domain-Confined Epitaxial Regrowth of Individual Nanoparticle: Implications for Nanofabrication

Anomalous Growth Rate of Ag Nanocrystals Revealed by in situ STEM

In Situ Atomic-Scale Observation of Silver Oxidation Triggered by Electron Beam Irradiation

Quasi-two-dimensional Ag Nanoparticle Formation in Silica by Xe Ion Irradiation and Subsequent Ag Ion Implantation

In situ growth of In2O3 nanocrystals by electron irradiation in transmission electron microscope

Formation of ZnS nanosized films by electron beam irradiation

Direct ion-beam deposition of Ag nanoparticles using a solid-state silver ion source

Fusion Behaviour and Mechanism of Ultrafine Ag-Cu Nanoparticles Induced by Electron Beam Irradiation

Controllable Fabrication of Hollow In2O3 Nanoparticles by Electron Beam Irradiation

Electron Beam Introduced Metallic Nanowires Growth

Direct Electron Beam Writing of Silver-Based Nanostructures

Controllable Synthesis of Silver Nanoparticles by the Pulsed Electrochemical Deposition in a Forced Circulation Reactor

In Situ Sintering of CdSe/CdS Nanocrystals under Electron Beam Irradiation

Controlling the Growth Locations of Ag Nanoparticles at Nanoscale by Shifting LSPR Hotspots

Electron-beam induced synthesis of nanostructures: a review

Ultrasonic Synthesis of Au/AgCl Hybrid Cubes and Their Evolution Under Electron Beam Irradiation

Effects Associated with Nanostructure Fabrication Using In Situ Liquid Cell TEM Technology