Abstract:This paper reports a new capacitive triaxial micro-accelerometer which consists of four identical dual beam-mass structure. Considering the temperature characteristic, beam consistency and zero bias and other factors of the accelerometer, the arrangement and anchor position, as well as matching capacitor are studied using ANSYS software to complete the design of the overall structure of the accelerometer. The research methed having been uesd is significant for optimizing structure of the micro-accelerometer.

Structure Design of A Novel Triaxial Micro-Accelerometer