The Investigation of Microstructure Silicon NH3 Gas Sensors Based on Polyaniline Nano-Thin Films

Xiao Ying Xu,Hui Ling Tai,Chun Hua Liu,Guang Zhong Xie,Xiao Song Du
DOI: https://doi.org/10.4028/www.scientific.net/amr.998-999.115
2014-01-01
Advanced Materials Research
Abstract:Polyaniline (PANI) nano-thin films were deposited on a novel microstructure silicon (MSS) substrate via in-situ self-assembly approach for NH3gas-sensing. The MSS was prepared by alkaline etching process, and gold interdigital electrodes were formed on the MSS surface by vacuum evaporation. The characterization of the MSS and PANI nanothin film were investigated by scanning electron microscope (SEM) and UV-Vis absorption spectroscopy. SEM images showed that the MSS exhibited an orderly uniform hemisphere array structure, and the MSS surface was covered by a compact PANI thin film which consists of PANI nanoparticles and PANI nanofibers. The gas-sensing properties of the sensor were examined at room temperature. The results revealed that the sensor exhibited a good response and recovery characteristics to NH3.
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