Abstract:In this paper, ultra-precision shaping and ultra-smooth polishing investigations have been done upon a high-purity quartz glass substrate with an aspheric surface in nanoparticle colloid jet machining, which is an ultra smooth surface processing technique utilizing surface chemical reaction between work surface atoms and nanoparticles to remove the uppermost surface atoms. The shaping and polishing characters of high-purity quartz glass in nanoparticle colloid jet machining has been researched. The surface profile of the high-purity quartz glass workpiece before and after shaping has been measured by surface profilometer. And the surface microscopic morphological characteristics of high-purity quartz glass surface polished by nanoparticle colloid jet machining have been observed by atomic force microscopy (AFM). The measurement results indicate that nanoparticle colloid jet machining has good shaping ability for surface shape correction in ultra-precision machining. And the AFM observation results show that the roughness of the high-purity quartz glass surface has been reduced from 1.919 nm RMS to 0.784 nm RMS by nanoparticle colloid jet machining.

Ultra-Precision Shaping and Ultra-Smooth Polishing Investigation of High-Purity Quartz Glass in Nanoparticle Colloid Jet Machining