Abstract:A novel method is presented to extract phase distribution from phase-shifted interferograms with unknown tilt phase shifts. The proposed method can estimate the tilt phase shift between two temporal phase-shifted interferograms with high accuracy, by extending the regularized optical flow method with the spatial image processing and frequency estimation technology. With all the estimated tilt phase shifts, the phase component encoded in the interferograms can be extracted by the least-squares method. Both simulation and experimental results have fully proved the feasibility of the proposed method. Particularly, a flat-based diffractive optical element with quasi-continuous surface is tested by the proposed method with introduction of considerably large tilt phase shift amounts (i.e., the highest estimated tilt phase shift amount between two consecutive frame reaches 6.18λ). The phase extraction result is in good agreement with that of Zygo's MetroPro software under steady-state testing conditions, and the residual difference between them is discussed. In comparison with the previous methods, the proposed method not only has relatively little restrictions on the amounts or orientations of the tilt phase shifts, but also works well with interferograms including open and closed fringes in any combination.

Rapid phase extraction method based on the difference image between interferograms with unknown phase-shifting amount

Phase Detection from Two Phase-Shifting Interferograms

Direct Phase Extraction from Interferograms with Random Phase Shifts

Two-step phase retrieval algorithm based on the quotient of inner products of phase-shifting interferograms

Phase-shift extraction for phase-shifting interferometry by histogram of phase difference.

Iterative Algorithm for Phase Extraction from Interferograms with Random and Spatially Nonuniform Phase Shifts

A Simple Phase Retrieval Algorithm from a Single Shot Interferogram

A precise three-step phase retrieval algorithm suitable for the interferograms with less than one fringes numbers

Phase Extraction from Interferograms with Unknown Tilt Phase Shifts Based on A Regularized Optical Flow Method

Efficient phase extraction from three random interferograms based on Lissajous figure and ellipse fitting method

Rapid and Precise Phase Retrieval from Two-Frame Tilt-Shift Based on Lissajous Ellipse Fitting and Ellipse Standardization.

Phase extraction from randomly phase-shifted interferograms by combining principal component analysis and least squares method.

Rapid and precise phase retrieval from two-frame tilt-shift based on Lissajous ellipse fitting and ellipse standardization

Accurate Phase Extraction Algorithm Based on Gram–Schmidt Orthonormalization and Least Square Ellipse Fitting Method

Phase Extraction from Optical Interferograms in Presence of Intensity Nonlinearity and Arbitrary Phase Shifts

Phase and Amplitude Reconstruction from a Single Carrier-Frequency Interferogram Without Phase Unwrapping.

Phase Retrieval in Two-Shot Phase-Shifting Interferometry Based on Phase Shift Estimation in a Local Mask.

Phase Extraction from Two Phase-Shifting Fringe Patterns Using Spatial-Temporal Fringes Method

Parameter mismatch phase extraction method for spatial phase-shifting interferograms

Fast phase extraction of a synthetic wavelength from a dual-wavelength interferogram through Hilbert transformation

Fast and Robust Two-Frame Random Phase-Shifting Interferometry Without Pre-Filtering.