Abstract:Catalyst synthesis with precise control over the structure of catalytic active sites at the atomic level is of essential importance for the scientific understanding of reaction mechanisms and for rational design of advanced catalysts with high performance. Such precise control is achievable using atomic layer deposition (ALD). ALD is similar to chemical vapor deposition (CVD), except that the deposition is split into a sequence of two self-limiting surface reactions between gaseous precursor molecules and a substrate. The unique self-limiting feature of ALD allows conformal deposition of catalytic materials on a high surface area catalyst support at the atomic level. The deposited catalytic materials can be precisely constructed on the support by varying the number and type of ALD cycles. As an alternative to the wet chemistry based conventional methods, ALD provides a cycle-by-cycle "bottom-up" approach for nanostructuring supported catalysts with near atomic precision.In this review, we summarize recent attempts to synthesize supported catalysts with ALD. Nucleation and growth of metals by ALD on oxides and carbon materials for precise synthesis of supported monometallic catalyst are reviewed. The capability of achieving precise control over the particle size of monometallic nanoparticles by ALD is emphasized. The resulting metal catalysts with high dispersions and uniformity often show comparable or remarkably higher activity than those prepared by conventional methods. For supported bimetallic catalyst synthesis, we summarize the strategies for controlling the deposition of the secondary metal selectively on the primary metal nanoparticle but not on the support to exclude monometallic formation. As a review of the surface chemistry and growth behavior of metal ALD on metal surfaces, we demonstrate the ways to precisely tune size, composition and structure of bimetallic metal nanoparticles. The cycle-by-cycle "bottom up" construction of bimetallic (or multiple components) nanoparticles with near atomic precision on supports by ALD is illustrated. Applying metal oxide ALD over metal nanoparticles can be used to precisely synthesize nanostructured metal catalysts. In this part, the surface chemistry of Al2O3 ALD on metals is specifically reviewed. Next, we discuss the methods of tailoring the catalytic performance of metal catalysts including activity, selectivity and stability, through selective blocking of the low-coordination sites of metal nanoparticles, the confinement effect, and the formation of new metal-oxide interfaces. Synthesis of supported metal oxide catalysts with high dispersions and "bottom up" nanostructured photocatalytic architectures are also included. Therein, the surface chemistry and morphology of oxide ALD on oxides and carbon materials as well as their catalytic performance are summarized. (C) 2016 Elsevier B.V. All rights reserved.

Atomic Layer Deposition of Aluminum Oxide in Mesoporous Silica Gel

Investigating the Trimethylaluminium/Water ALD Process on Mesoporous Silica by In Situ Gravimetric Monitoring

High-surface-area, Iron-Oxide Films Prepared by Atomic Layer Deposition on Γ-Al2o3

Interfacial Catalysis in and Initial Reaction Mechanism of Al2o3 Films Fabricated by Atomic Layer Deposition Using Non-Hydrolytic Sol-Gel Chemistry

First-Principles Predictions and in Situ Experimental Validation of Alumina Atomic Layer Deposition on Metal Surfaces

Ultrasound As a Tool to Synthesize Nano-Sized Silica–Alumina Catalysts with Controlled Mesoporous Distribution by a Novel Sol–Gel Process

Surface Modification of Au/Tio2 Catalysts by Sio2 Via Atomic Layer Deposition

Scalable production of single 2D van der Waals layers through atomic layer deposition: bilayer silica on metal foils and films

Genesis and Evolution of Surface Species During Pt Atomic Layer Deposition on Oxide Supports Characterized by in Situ XAFS Analysis and Water−Gas Shift Reaction

Porous Alumina Protective Coatings on Palladium Nanoparticles by Self-Poisoned Atomic Layer Deposition

Unravelling the Selective Growth Mechanism of AlOx with Dimethylaluminum Isopropoxide As a Precursor in Atomic Layer Deposition: a Combined Theoretical and Experimental Study

A vesicle-aggregation-assembly approach to highly ordered mesoporous γ-alumina microspheres with shifted double-diamond networks.

Atomic Layer Deposition-Sequential Self-Limiting Surface Reactions for Advanced Catalyst "Bottom-Up" Synthesis

Aldol Condensation Reaction of Methyl Acetate and Formaldehyde Over Cesium Oxide Supported on Silica Gel: An Experimental and Theoretical Study

Rapid atomic layer deposition of silica nanolaminates: synergistic catalysis of Lewis/Brønsted acid sites and interfacial interactions.

Modification of High-Surface-Area Carbons Using Self-Limited Atomic Layer Deposition

A Novel Method To Synthesize Amorphous Silica−Alumina Materials with Mesoporous Distribution without Using Templates and Pore-Regulating Agents

Synthesis and characterization of silica doped alumina catalyst support with superior thermal stability and unique pore properties

Influence of alkalinity and steric hindrance of lewis-base catalysts on atomic layer deposition of SiO 2

Controlling Pt nanoparticle sintering by sub-monolayer MgO ALD thin films

In Situ X-Ray Photoelectron Spectroscopy Analysis of the Atomic Layer Deposition of Al2O3 on SiO X /si: Interface Dipole and Persistent Surface Groups