Design And Fabrication Of An Mea Microchip For Cell Culture Study

yang yang,junyang liu,cheng zong,bo liu,daxiao zhang,w sun,yuanfei wu,miao lu,zhongqun tian
DOI: https://doi.org/10.1080/10584587.2012.685404
2012-01-01
Integrated Ferroelectrics
Abstract:In this communication, we reported the design and fabrication of a gold microelectrode array (MEA) microchip for cell culture study in detail. The microchip contains a microfluidic channel with width of 20 mu m, and solution is supplied via a syringe. Microelectrode array is fabricated by photolithography, reactive ion etching (RIE) and some other microfabrication techniques. Moreover, the microchip is compatible with Raman scattering investigation, providing a platform for simultaneous measurement of electrical and spectral response for a single cell under stimulation.
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