Abstract:Zinc oxide (ZnO) thin films have been grown by radio frequency sputtering technique on fused silica substrates. Optical and morphological characteristics of as-grown ZnO samples were measured by various techniques; an X-ray diffraction spectrum showed that the films exhibited hexagonal wurtzite structure and were c-axis-oriented normal to the substrate surface. Scanning electron microscopy images showed the dense columnar structure of the ZnO layers, and light absorption measurements allowed us to estimate the penetration depth of the optical radiation in the 200 to 480 nm wavelength range and the ZnO band-gap. ZnO layers were used as a basic material for surface acoustic wave (SAW) delay lines consisting of two Al interdigitated transducers (IDTs) photolithographically implemented on the surface of the piezoelectric layer. The Rayleigh wave propagation characteristics were tested in darkness and under incident UV light illumination from the top surface of the ZnO layer and from the fused silica/ZnO interface. The sensor response, i.e., the wave velocity shift due to the acoustoelectric interaction between the photogenerated charge carriers and the electric potential associated with the acoustic wave, was measured for different UV power densities. The reversibility and repeatability of the sensor responses were assessed. The time response of the UV sensor showed a rise time and a recovery time of about 10 and 13 s, respectively, and a sensitivity of about 318 and 341 ppm/(mW/cm2) for top and bottom illumination, respectively. The ZnO/fused silica-based SAW UV sensors can be interrogated across the fused silica substrate thanks to its optical transparency in the UV range. The backlighting interrogation can find applications in harsh environments, as it prevents the sensing photoconductive layer from aggressive environmental effects or from any damage caused by cleaning the surface from dust which could deteriorate the sensor's performance. Moreover, since the SAW sensors, by their operating principle, are suitable for wireless reading via radio signals, the ZnO/fused-silica-based sensors have the potential to be the first choice for UV sensing in harsh environments.

Ultraviolet Sensing Based on Nanostructured ZnO/Si Surface Acoustic Wave Devices

Surface Acoustic Wave Ultraviolet Detector Based on Zinc Oxide Nanowire Sensing Layer

UV Sensor Based on Surface Acoustic Waves in ZnO/Fused Silica

Performance Improvement of Ultraviolet Sensor of ZnO Nanorod Arrays

Transparent Zno/Glass Surface Acoustic Wave Based High Performance Ultraviolet Light Sensors

Ultraviolet photodetectors based on ZnO nanowires with SiO2/ZnO multilayers

Ultraviolet photodetectors based on ZnO nanowires with SiO<sub>2</sub>/ZnO multilayers

Thermal Annealing Effect on ZnO Surface Acoustic Wave-Based Ultraviolet Light Sensors on Glass Substrates

Decoupling Acoustoelectric and Thermal Effects of Ultraviolet Responses for Acoustic Wave Sensing Mechanisms

Single-crystalline ZnS nanobelts with sharp ultraviolet (UV) emission at room temperature as UV-light sensors

Integrated Ultraviolet Sensor Using Zinc Oxide Nanorods by Ac-Electric-Filed-Assisted Growth Method

High Performance Dual-Wave Mode Flexible Surface Acoustic Wave Resonators for Uv Light Sensing

Thermal-desorption Induced Enhancement and Patterning of Ultraviolet Emission in Chemically Grown ZnO

ZnO UV photodetector with controllable quality factor and photosensitivity

Three-Dimensional Tetrapodal ZnO Microstructured Network Based Flexible Surface Acoustic Wave Device for Ultraviolet and Respiration Monitoring Applications

High-performance UV photodetection of unique ZnO nanowires from zinc carbonate hydroxide nanobelts.

UV Photodetectors: Single‐Crystalline ZnS Nanobelts As Ultraviolet‐Light Sensors (adv. Mater. 20/2009)

Realization of a high-Responsivity ultraviolet sensor base on ZnO nanowires modified by Au nanoparticles

Focused Ion Beam Exposed Zinc Acetate Films for Preparation of Highly Sensitive Ultraviolet Photodetectors

Development of ZnO and Si Semiconductor-Based Ultraviolet Photodetectors Enhanced by Laser-Ablated Silver Nanoparticles

Au Nanoparticles-Decorated Surface Plasmon Enhanced ZnO Nanorods Ultraviolet Photodetector on Flexible Transparent Mica Substrate