Defect-Controlled Gas Sensing Property of Nanostructured ZnO Films

Yong Qin Chang,Chang Jing Shao,Nan Jiang,Yan Jun Ma,Shi Qi Wang,Bo Zou,Yi Long
DOI: https://doi.org/10.4028/www.scientific.net/msf.814.54
2015-01-01
Materials Science Forum
Abstract:Nanostructured ZnO films were fabricated by chemical vapor deposition (CVD) method with different Sn source concentrations for ethanol sensing application. It was found that the morphology of the ZnO films were obviously affected by Sn concentration, while no any Sn signals were detected in the films. The response of the nanostructured ZnO films increases with the increase of ethanol concentrations, and the S2 sample displays the highest sensitivity. Thephotoluminescence spectra show that more oxygen vacancies exist in the S2 sample than the other samples, which reveals that oxygen vacancies may play a great role to improve the gas sensing properties of the ZnO films.A possible sensing mechanism was proposed to explain these phenomena.This work provides a very simple and efficient method to prepare ZnO gas sensor, its high response and short recovery time are also a merit for the ZnO films used in gas sensor applications.
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