Abstract:Hydrogen atoms and SiClx (x = 1, 2, 3) radicals coexist during the hydrogenation of silicon tetrachloride (STC, SiCl4), an important process in the fabrication of industrial polysilicon. In this work, the mechanisms and kinetics of the reactions between H and SiClx (x = 1, 2, 3) were studied by theory. The structures and vibrational frequencies of reactants, products, intermediates, and transition states (TSs) were determined at the B2PLYP/may-cc-pVTZ level. The single-point energies of minima and saddle points were refined using the coupled-cluster single-double with triple perturbative (CCSD(T)) with the complete basis set extrapolation method. Some special treatments were designed to obtain reliable wave functions for unimolecular reactions without tight TSs by the density functional theory. Subsequently, Lennard-Jones (L-J) parameters between each intermediate (SiHClx) and bath gas (He) were obtained at the MP2/jul-cc-pVTZ level to derive reliable temperature- and pressure-dependent rate coefficients for unimolecular reactions according to the variational Rice-Ramsperger-Kassel-Marcus theory. For bimolecular reactions, rate coefficients were determined by the variational transition-state theory. The rate coefficients of barrierless reactions were derived based on the loose TSs with the maximum free energy. Finally, the master equation analysis was used to investigate the variation of the rate coefficients with pressure and temperature in the activated paths.

CuCl-Catalyzed Hydrogenation of Silicon Tetrachloride in the Presence of Silicon: Mechanism and Kinetic Modeling

Hydrogenation of Silicon Tetrachloride in the Presence of Silicon: Thermodynamic and Experimental Investigation

Experimental Study on Hydrogenation of SiCl4 to SiHCl3 in a Stirred Bed Reactor

Theoretical Investigations for Kinetics of the Chemical Reactions: H + SiClx (x = 1, 2, 3).

Effect of Cu Vacancy on Cu<sub>3</sub>Si(001) Surface for the Synthesis of SiHCl<sub>3</sub> by Hydrogenation of SiCl<sub>4</sub>:A DFT Study

Cu-Si bond and Cl defect synergistical catalysis for SiCl4 dissociation on CuCl2(1 0 0): A DFT study

Thermodynamic analysis of co-hydrogenation of silicon tetrachloride and silicon

Selective Synthesis of Triethoxysilane and Tetraethoxysilane through Direct Reaction between Ethanol and Silicon Catalyzed by CuCl and Metallic Cu0 Nanoparticles in Fixed-bed Reactor

Preparation and Redistributed Mechanism of Dimethyldichlorosilane Catalyzed by the AlCl3/ZSM-5(5T)@MIL-53(Al) Core-Shell Catalyst

A transport-kinetic model development for polysilicon chemical vapor deposition in a SiHCl3–H2 system

Effects of CuCl Source and Content on Direct Synthesis of Triethoxysilane from Silicon and Ethanol

Effect Of Cucl Particle Size On The Reduction Reaction By Silicon In Preparation Of Contact Mass Used For Methylchlorosilane Synthesis

Atomistic description of Si etching with HCl

Multiple Pathways for Dissociative Adsorption of SiCl4 on the Si(100)-c(4×2) Surface.

Deciphering Dynamics of the Cl + SiH 4 → H + SiH 3 Cl Reaction on a Machine Learning Made Globally Accurate Full-Dimensional Potential Energy Surface.

Catalytic Disproportionation of Trimethoxysilane to Monosilane: Studies on Catalyst, Kinetics and Reactor Modeling

Mechanism and Kinetics of the Synthesis of Phenyltrichlorosilane from Trichlorosilane and Chlorobenzene by Gas Phase Condensation

The Mechanism of Surface Hydrogenation on SiC/Metal Contact

Modification of CuCl catalyst used in the direct synthesis reaction of methyl chlorosilane monomer

Study on the Hydrogenation of SiC Surface

Chlorination of trichlorosilane/chlorodimethylsilane using metal chlorides: experimental and mechanistic investigations