Abstract:This paper is a computational bifurcation analysis of a non-linear partial differential equation (PDE) characterizing equilibrium configurations in Micro electromechanical Systems (MEMS). MEMS are engineering systems that utilize electrostatic forces to actuate elastic surfaces. The potential equilibrium states of MEMS are described by solutions of a singularly perturbed elliptic nonlinear PDE. We develop a numerical method which couples a finite element approximation with mesh refinement to a pseudo arc-length continuation algorithm to numerically obtain bifurcation diagrams in the physically relevant two dimensional scenario. Several geometries, including a unit disk, square, and annulus, are studied to understand the behavior of the system over a range of domains and parameter regimes. We find that solution multiplicity, and importantly the potential for bistability in the system, depends sensitively on the parameters. In the annulus domain, symmetry breaking bifurcations are located and asymmetric solution branches are tracked. This work significantly extends the envelope for numerical characterization of equilibrium states in microscopic electrostatic contact problems relating to MEMS.

Asymptotic stability and quenching behavior of a hyperbolic nonlocal MEMS equation

On a Hyperbolic Equation Arising in Electrostatic MEMS

Global solution of the initial boundary value problem to a hyperbolic nonlocal MEMS equation

On the Quenching Behavior of the Mems with Fringing Field

Effects of disorder on the Raman line-shape in ZrO_2

Quenching for a Parabolic Equation with Variable Coefficient Modeling MEMS Technology

The abstract quasilinear Cauchy problem for a MEMS model with two free boundaries

A parabolic free boundary problem modeling electrostatic MEMS

On an elliptic-parabolic MEMS model with two free boundaries

Asymptotic behaviour of the wave equation with nonlocal weak damping, anti-damping and critical nonlinearity

The Quenching Behavior of a General Singular Electrostatic Micro-Electro-Mechanical-System

Existence and uniqueness for a coupled parabolic‐hyperbolic model of MEMS

Wellposedness of a nonlinear parabolic-dispersive coupled system modelling MEMS

On a Quasilinear Parabolic-Hyperbolic System Arising in MEMS Modeling

Existence and uniqueness for a coupled parabolic-hyperbolic model of MEMS

Numerical bifurcation analysis of post-contact states in mathematical models of Micro-Electromechanical Systems

On A Parabolic Equation in MEMS with An External Pressure

The Quenching Phenomenon of a Nonlocal Semilinear Heat Equation with a Weak Singularity

Asymptotic Stability of Intermittently Damped Semi-Linear Hyperbolic-Type Equations

On a parabolic equation in microelectromechanical systems with an external pressure

A stationary free boundary problem modeling electrostatic MEMS