Boron doped nanocrystalline silicon film characterization for solar cell application

Chao Song,Xiang Wang,Jie Song,Zhenxu Lin,Yi Zhang,Yanqing Guo,Rui Huang
DOI: https://doi.org/10.1007/s40843-015-0086-6
2015-01-01
Science China Materials
Abstract:Lightly doped hydrogenated amorphous silicon thin films were deposited through the plasma enhanced chemical vapor deposition (PECVD) technique using a gas mixture of SiH4, B2H6, and H2 as the precursor. By using thermal annealing at 800 and 1000°C, boron doped nanocrystalline silicon films were obtained. X-ray photoelectron spectroscopy (XPS) measurements demonstrated the presence of substitutional boron in the doped films. Based on the measurement of dark conductivity as a function of temperature, p-type nanocrystalline silicon (nc-Si:H) films with high room temperature conductivity and low active energy were observed. By using these p-type silicon films, P-N junction solar cells were prepared on the n-type nc-Si substrate. The device characteristics were investigated based on the measurements of the current-voltage and spectral-response.
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