Nano Scale Depth Reconstruction Based on Optical Diffraction

WEI YangJie,WU ChengDong,DONG ZaiLi
DOI: https://doi.org/10.1360/n092014-00013
2014-01-01
Abstract:Traditional depth from defocus (DFD) is based on the imaging principle in geometric optics to calculate blurring degree, influence of optical diffraction has never been considered. However, diffraction is a basic property of all kinds of waves, it must happen in an optical imaging system based on pinhole imaging principle. In this paper, a high resolution DFD method with a single vision and optical diffraction is given. Firstly, the basic principle of Fresnel diffraction in an optical system is analyzed, and the relationship curve between Fresnel diffraction and depth information is constructed. Secondly, a defocus imaging model with optical diffraction is supposed through curve fitting, and with respect to relative blurring and heat diffusion, a new DFD method with optical diffraction and two defocused images is proposed. Finally, a standard nano grid is used to validate the proposed DFD method on nana scale. The results show that the new algorithm, compared with traditional DFD algorithms, is a more effective method to reconstruct depth information on nano scale.
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