Study on Wavefront Pre-Compensation of Thermal Deformation Aberrations in the Beam Path by FEM and Zernike Polynomials

Zhou Qiong,Liu Wenguang,Jiang Zongfu,Xu Xiaojun
DOI: https://doi.org/10.1117/12.2050245
2014-01-01
Abstract:We present a new method to calculate wavefront pre-compensation of the thermal deformation aberrations based on the finite element method (FEM) and Zernike polynomials. The thermal deformation aberrations of a plat circular Si mirror are theoretically analyzed in detail. Model of the beam path with 4 reflective mirrors and a uniform incident laser source is established. With the above model, performances of the outgoing laser with and without wavefront pre-compensation are calculated, respectively. The results show that the Strehl ratio of the outgoing laser beam is increased from 0.13 to 0.66 with wavefront pre-compensation using the new method. The influence of Fresnel number on the ability of wavefront pre-compensation was also studied. The value of SR increases to 0.83 as the Fresnel number is 257. The ability of wavefront pre-compensation is limited when the Fresnel number is small.
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