Terahertz Addressed Spatial Light Modulator Based On Bi-Material Cantilevers Array

yan wen,wei ma,xiaomei yu,y zhao,min liu,liang dong
DOI: https://doi.org/10.1109/transducers.2015.7181074
2015-01-01
Abstract:This paper reports a novel spatial light modulator (SLM) with 256x256 pixels addressed by terahertz (THz) radiation. The SLM was realized by integrating metamaterial absorbers (MAs) into bi-material cantilever pixels and fabricated by a polyimide (PI) sacrificial layer process on a glass substrate. The device works passively in an optical reflection mode with no-electronic components and can easily achieve high resolution. The coaxial visible light was spatially modulated to a Gaussian spot and cross shape with the measured modulation sensitivity of 0.18 deg/mu W and the theoretical time constant of 7.8ms.
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