Multi-mJ, Khz Picosecond Deep UV Source Based on a Frequency-Quadrupled Cryogenic Yb:YAG Laser

Kyung-Han Hong,Chun-Lin Chang,Peter Krogen,Houkun Liang,Gregory J. Stein,Jeffrey Moses,Chien-Jen Lai,Franz X. Kaertner
DOI: https://doi.org/10.1117/12.2179937
2015-01-01
Abstract:We report on the development of a 2.74-mJ, similar to 4.2 ps, similar to 258 nm deep-ultraviolet (DUV) source at 1 kHz based on frequency quadrupling of similar to 32 mJ, 8.4 ps, similar to 1030 nm near-infrared (NIR) laser pulses with an excellent beam profile, generated from a diode-pumped, ultrafast hybrid Yb-doped chirped-pulse amplification laser system. We have used a two-stage second harmonic generation scheme at LBO (NIR-to-green) and BBO crystals (green-to-DUV), respectively, to achieve the fourth-harmonic generation (FHG). The NIR-to-DUV conversion efficiency of similar to 10% in the FHG is obtained. The peak power of the produced DUV laser pulses is as high as 0.56 GW. The beam profiles at near-field and far-field are found to be excellent and the M-2 value is measured as similar to 2.6. We also present the systematic parameter study on the optimization of DUV generation. To our best knowledge, this is the most energetic DUV generation from a diode-pumped solid-state laser at kHz repetition rates.
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