Applications of Laminar Weak-Link Mechanisms for Ultraprecision Synchrotron Radiation Instruments

D. Shu,T. S. Toellner,E. E. Alp,J. Maser,J. Ilavsky,S. D. Shastri,P. L. Lee,S. Narayanan,G. G. Long
DOI: https://doi.org/10.1063/1.2436249
2007-01-01
Abstract:Unlike traditional kinematic flexure mechanisms, laminar overconstrained weak-link mechanisms provide much higher structure stiffness and stability. Using a laminar structure configured and manufactured by chemical etching and lithography techniques, we are able to design and build linear and rotary weak-link mechanisms with ultrahigh positioning sensitivity and stability for synchrotron radiation applications. Applications of laminar rotary weak-link mechanism include: high-energy-resolution monochromators for inelastic x-ray scattering and x-ray analyzers for ultrasmall-angle scattering and powder-diffraction experiments. Applications of laminar linear weak-link mechanism include high-stiffness piezo-driven stages with subnanometer resolution for an x-ray microscope. In this paper, we summarize the recent designs and applications of the laminar weak-link mechanisms at the Advanced Photon Source.
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