Abstract:Silicon nanowire field-effect transistor (SiNW-FET) sensors possess the ability of rapid response, real-time, and label-free detection with high sensitivity and selectivity in the analysis of charged molecules. Their nano-scale size makes them well suited for ultralow detection of charged molecules, but also brings the uniformity fabrication challenging, thus limiting their large-scale application. By a horizontal control approach, highly controllable silicon nanowires arrays at the top of the silicon-on-insulator (SOI) wafer (T-SiNW) were developed in our previous work. To further improve the device uniformity, here a novel SiNW fabricated approach was carefully designed by the combination of horizontal and vertical control. The new silicon nanowires appeared at the bottom of the top silicon layer (B-SiNW). The B-SiNW has a relatively low requirement on the fabrication process and better device uniformity compared to T-SiNW. These improvements resulted in the B-SiNW device with a lower current fluctuation (4.1 nA with 5.1% variations) in the flowing liquid, compared to the T-SiNW device (4.4 nA with 11% variations). Further, in quantitative detection of 40 ng/mL MMP-9, the B-SiNW sensors provided larger signals and lower fluctuation (normalized average response value: 0.57 with 4.2% variations), compared to the T-SiNW sensors (0.41 with 12.1% variations), thus indicating a more accurate bio-analysis application of the B-SiNW sensor. This work advances the nanowire sensor technology a step closer toward large-scale application to create stable sensing platforms in disease diagnosis and monitoring.

Selective-process-based silicon nanowires batch fabrication technique and its surface biomolecule assembly with the sensor applications

Silicon nanowire arrays for label-free detection of DNA.

Fabrication of Silicon Nanowire Devices for Ultrasensitive, Label-Free, Real-Time Detection of Biological and Chemical Species.

A controllable fabrication improved silicon nanowire array sensor on (111) SOI for accurate bio-analysis application

Point decoration of silicon nanowires: an approach toward single-molecule electrical detection.

Patterned Growth of Vertically Aligned Silicon Nanowire Arrays for Label-Free DNA Detection Using Surface-Enhanced Raman Spectroscopy.

Large-scale Assembly of Semiconductor Nanowires into Desired Patterns for Sensor Applications

Nanowire biosensors for label-free, real-time, ultrasensitive protein detection.

Enhanced Sensing Of Nucleic Acids With Silicon Nanowire Field Effect Transistor Biosensors

Nanostructured Si-nanowire Microarrays for Enhanced-Performance Bio-Analytics

Air Heating Approach for Multilayer Etching and Roll-to-roll Transfer of Silicon Nanowire Arrays As SERS Substrates for High Sensitivity Molecule Detection.

Silicon Nanowire Microfluidic Biosensor for Multiplexed Biomolecule Detection

Silicon-Based Platform for Biosensing Applications

Silicon-nanowire-based CMOS-compatible field-effect transistor nanosensors for ultrasensitive electrical detection of nucleic acids.

Fabrication of Silicon Nanowire Sensors for Highly Sensitive pH and DNA Hybridization Detection

Silicon Nanowires/nanoribbons for Label-Free Electrical Detection of Biomolecules

Silicon Nanowire Field-effect-transistor-based Biosensor for Biomedical Applications

Ultra-sensitive nucleic acids detection with electrical nanosensors based on CMOS-compatible silicon nanowire field-effect transistors.

Assembly of Selective Biomimetic Surface on an Electrode Surface: a Design of Nano-Bio Interface for Biosensing.

Dispersion, Refinement, and Manipulation of Single Silicon Nanowires

Progress in Silicon Nanowire-Based Field-Effect Transistor Biosensors for Label-Free Detection of Dna