Integrated-Optic Switches for Phased-Array Applications Based on Electrostatic Actuation of Metallic Membranes

GA MAGEL,TH LIN,LY PANG,WR WU
DOI: https://doi.org/10.1117/12.177390
1994-01-01
Abstract:Photonic ON/OFF and routing switches can be made using alterations of the modal effective index caused by changing the cladding on a dielectric waveguide. Drumhead-like aluminum membranes are formed electrostatically pulled into contact with the waveguides, with operating times of tens to hundreds of microseconds. An ON/OFF switch (or digital modulator) with an extinction ratio of 19 dB has been demonstrated using the change in the imaginary part of the effective index of a silicon nitride rib waveguide. Routing switches based on directional couplers are under development, and their feasibility has been demonstrated with a deposited (fixed) aluminum film. The switches are fabricated on silicon using VLSI-compatible processes, and can be used to select optical time delays for phased-array signal processing.
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