Schwarzschild Microscope at the Wavelength of 18 Nm Using a Laser-Produced Plasma Source

ZS WANG,JL CAO,B CHEN,YY MA,JP ZHANG,XD CHEN
DOI: https://doi.org/10.1117/12.212619
1995-01-01
Abstract:The design , construction and imaging experiments of a soft X-ray microscope which consists of acompact laser-produced plasma source (LPPS) , as well as a multilayer coated spherical condenser, and Schwarzschild optics are presented. The Schwarzschild optics was designed for numerical aperture of 0. 1 and magnification of 10. For the working wavelength of 18 nm calculations show that the resolution is expected to be 0.2im. We designed a 41 layer Mo/Si multilayer coatings of throughput centered at l8nm, and these coatings were deposited by magnetron sputtering. We put a Al/C multilayer filter in front of the image to block thelong wavelength radiation. The object on the primary experiments is a piece of Cu mesh of 55 pair lines/mm witha opening of 5m and bar width of 3im. The backlit mesh image were taken on Kodak X-ray film. The first lot of experiment data show that a spatial resolution better than 1im was obtained. Key words : Schwarzschild Optics , Soft X-Ray Microscope , Multilayer mirrors.
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