Applying the Adjusting Method of Least Square to Obtain Original Data of Flatness Error

DS LI,JB TAN,XF QIANG,WG YANG,XP ZHAO
DOI: https://doi.org/10.1117/12.156410
1993-01-01
Abstract:In order to reflect the shape of measured flat fully and reasonably authors of the paper apply the least square method to the processing of original data. First of all the paper expounds the establishment of mathematical model by means of simple examples. Then the difference of accuracy of two patterns is compared under the condition when the number of measured points are same and the patterns of mensuring pathes are different. Thereby the scheme of measuring path which can reach higher accurary is determined. Finally through calculating two groups of data and comparing the results with that of traditianal method the correctness rcasonableness and practicality of the method are verified.
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