Micro Actuator Array Based on Ionic Polymer with Patterned Self-Assembled Gold Electrode

M Le Guilly,CY Xu,M Taya,Y Kuga
2004-01-01
Abstract:A new fabrication technique is proposed to create electrodes on thin ionic polymer membranes for micro actuator applications. The technique consists in plasma deposition of a thin (a few nm) allylamine coating on the membrane followed by stepwise assembly of Au colloids on the amine surface into a conductive electrode. Patterned gold electrodes can be created by using a stencil mask during allylamine plasma deposition. The influence of the allylamine plasma conditions on the electrode and the subsequent actuator is studied. A Flemion membrane (14mum) with a low power plasma allylamine coating and 10 sequential assemblies of Au colloids showed a fast, repeatable actuation at +/-1.5V.
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