Development Of Conductive Polymer Micro Cantilever For Conductivity Measurement

Ping Du,Xin Zhang,Xi Lin
DOI: https://doi.org/10.1115/imece2008-67986
2009-01-01
Abstract:Conductive polymers are an unusual class of organic materials that exhibit high electrical conductivity at room temperature. Some reduction or oxidation (redox) state dependent properties (conductivity, color, volume, permeability) can be easily controlled by electrical stimuli, which makes it possible to construct transistors, OLEDs, actuators and membranes. In this work, we focus on the actuator aspect, where the volume change relies on the ions and solvent flux. We synthesize the polypyrrole by electrochemical deposition and derive the relationship between the film thickness and the growth rate. We further develop a novel process to fabricate single layer micro cantilever structures for conductivity measurements. The conductivity of the final structure could achieve around 5.40 S/cm.
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