A Silicon-Based Positive-Intrinsic-Negative Photodetector Double Linear Array on a Thick Intrinsic Epitaxial Layer

袁立,吴灿,张兆华,任天令,yuan li,wu can,zhang zhaohua,ren tianling

DOI: https://doi.org/10.1088/0256-307X/31/5/058502

2014-01-01

Chinese Physics Letters

Abstract:To measure small particles in clouds without the optical amplification system, a new type of p-i-n photodetector linear array with 128 diode units altogether is designed and realized. In each die, there are two rows of photodiode line array, and each row has 64 photodiodes. Every photodiode has a size of 100 mu m x 100 mu m with an individual output, and each of them is isolated by the trenches. The depth of them has the same thickness as that of the epitaxial layer, which is designed to be 30 mu m to guarantee sufficient absorption of photons and leave a margin for the diffusion of p-type and n-type region. The detector has been tested with a laser whose wavelength was 650 nm and irradiance is 50 mW/cm(2). The achieved photocurrent is 2 mu A. Hence, the current responsivity is about 0.4 A/W, and the external quantum efficiency is 76.45%. The dark current is less than 600 pA. Both of the sufficient absorption of photons and low dark current are achieved by utilizing the thick epitaxial intrinsic layer. Low interference of adjacent photodiodes is also guaranteed by the trenches around the photodiodes. With the obtained performance, the photodetector can be used to measure the diameter of precipitation particles in clouds. Therefore, rainfall can be judged based on the diameter of particles.