Sheath dynamics in radio-frequency atmospheric glow discharges
Shi, J.J.,Kong, M.G.
DOI: https://doi.org/10.1109/TPS.2005.844999
IF: 1.368
2005-01-01
IEEE Transactions on Plasma Science
Abstract:This paper presents images of dynamic sheath evolu- tion in a radio-frequency atmospheric pressure glow discharge at 13.56 MHz. Electron mean energy, electron production rate, elec- tron density, and electric field are used to highlight volumetric gas ionization at low-current densities and localized gas ionization at large current densities. Index Terms—Atmospheric pressure glow discharges, glow modes, plasma dynamics, sheath, simulation. A TMOSPHERIC pressure glow discharges (APGDs) are currently a subject of active research, partly due to their immense potentials for wide-ranging application and partly due to fresh scientific challenges presented by these newly identified gas plasmas (1). At radio-frequencies in the mega-hertz range, APGD are typically generated between two metallic electrodes without dielectric barrier. These high-frequency capacitive glow plasmas have been studied for their current-voltage character- istics, optical emission and reaction chemistry (2)-(4). While these studies are important in capturing the macroscopic fea- tures of radio frequency (RF) APGD, the corresponding under- pinning physiochemical processes on the microscopic scale re- main relatively unknown. A sound understanding of such un- derpinning physiochemical processes is highly desirable, as it offers valuable guidance to effective control of plasma stability and chemical reactivity. Recognizing that many underpinning processes are determined by behaviors of the sheath region near the electrodes, we present in this paper images of dynamic evo- lution of APGD sheath as a contribution to a full understanding of APGD. Our approach is computational as this allows for a more ef- fective access to plasma dynamic information than diagnostics methodologies that are at present relatively under-developed for APGD. Our plasma model is based on a self-consistent and con- tinuum treatment developed for RF APGD, and its predictions of the current and voltage characteristics agree favorably with relevant experimental data (2) and numerical results (5). We consider a 13.56-MHz glow discharge generated in an atmo- spheric helium gap of 2.5 mm and at gas pressure of 600 torr. While impurity gases, such as nitrogen, are known to be im- portant in APGD, we decide not to include their effect for this study, partly because the general trend of sheath dynamics in RF APGD is found numerically to be independent of the inclusion of impurity nitrogen and partly because it is useful to distinguish