Polarization-Sensitive Microelectromechanical Systems Based Tunable Terahertz Metamaterials Using Three Dimensional Electric Split-Ring Resonator Arrays

Fusheng Ma,You Qian,Yu-Sheng Lin,Hongwei Liu,Xinhai Zhang,Zhen Liu,Julius Ming-Lin Tsai,Chengkuo Lee
DOI: https://doi.org/10.1063/1.4803048
IF: 4
2013-01-01
Applied Physics Letters
Abstract:We present the design, simulation, fabrication, and characterization of structurally reconfigurable metamaterials showing terahertz frequency tunability with a polarization-sensitivity. The proposed metamaterial structures employ deformable microelectromechanical system based curved cantilevers for tuning the resonance frequency of the electric split-ring resonators. The resonance frequency is observed to be either tunable or non-tunable with the electric field of the incident wave, which is perpendicular or parallel to the split gap of the electric split-ring resonators. This polarization-sensitive characteristic has been demonstrated by both the electromagnetic simulation and the experimental measurement. The observed polarization-sensitive tunability could be used for the development of polarization sensitive and insensitive THz polarimetric devices.
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