Scanning Probe Energy Loss Spectroscopy below 50 Nm Resolution

F Festy,RE Palmer

DOI: https://doi.org/10.1063/1.1818742

IF: 4

2004-01-01

Applied Physics Letters

Abstract:We report scanning probe energy loss spectroscopy (SPELS) measurements from a roughened Si(111) surface in ultrahigh vacuum. The experiments, which utilize a scanning tunneling microscope tip in the field emission mode as the electron source, establish that the spatial resolution in SPELS is better than 50nm. The spectral maps acquired indicate different contrast mechanisms for the inelastically scattered and secondary electrons identified in the energy loss spectrum.