Fluoroethylenepropylene Ferroelectret Films With Cross-Tunnel Structure For Piezoelectric Transducers And Micro Energy Harvesters

xiaoqing zhang,g m sessler,yujie wang
DOI: https://doi.org/10.1063/1.4893367
IF: 2.877
2014-01-01
Journal of Applied Physics
Abstract:Layered fluoroethylenepropylene (FEP) ferroelectret films with cross-tunnel structure were fabricated from sheets of FEP films by template-patterning followed by a fusion-bonding process and contact charging. The typical piezoelectric d(33) coefficients, measured by a quasi-static method of samples not annealed, are in the range of 1000-3700 pC/N. The resonance behavior of the samples is analyzed by dielectric spectroscopy which also yields Young's modulus. Microphones built with such films exhibit a somewhat decreasing frequency response up to 1 kHz, an increase of the responses due to diffraction effects at higher frequencies, and eventually a peak probably due to a thickness resonance at about 40 kHz. Annealing at 125 degrees C indicates that the sensitivity stabilizes at about 40% of the original value. From this data, stable dynamic d(33) coefficients of up to 300 pC/N can be calculated. A micro energy harvesting generator utilizing these films and based on the excitation of thickness vibrations is also described. With an active area of 4.3 cm(2) and a seismic mass of 69.5 g, power up to 0.5 mu W referred to an acceleration of 1 g can be generated at a frequency of 120 Hz. (C) 2014 AIP Publishing LLC.
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