Abstract:Two-dimensional (2D) transition-metal dichalcogenides have shown great potential for energy storage applications owing to their interlayer spacing, large surface area-to-volume ratio, superior electrical properties, and chemical compatibility. Further, increasing the surface area of such materials can lead to enhanced electrical, chemical, and optical response for energy storage and generation applications. Vertical silicon nanowires (SiNWs), also known as black-Si, are an ideal substrate for 2D material growth to produce high surface-area heterostructures, owing to their ultrahigh aspect ratio. Achieving this using an industrially scalable method paves the way for next-generation energy storage devices, enabling them to enter commercialization. This work demonstrates large surface area, commercially scalable, hybrid MoS2/SiNW heterostructures, as confirmed by Raman spectroscopy, with high tunability of the MoS2 layers down to the monolayer scale and conformal MoS2 growth, parallel to the silicon nanowires, as verified by transmission electron microscopy (TEM). This has been achieved using a two-step atomic layer deposition (ALD) process, allowing MoS2 to be grown directly onto the silicon nanowires without any damage to the substrate. The ALD cycle number accurately defines the layer number from monolayer to bulk. Introducing an ALD alumina (Al2O3) interface at the MoS2/SiNW boundary results in enhanced MoS2 quality and uniformity, demonstrated by an order of magnitude reduction in the B/A exciton photoluminescence (PL) intensity ratio to 0.3 and a reduction of the corresponding layer number. This high-quality layered growth on alumina can be utilized in applications such as for interfacial layers in high-capacity batteries or for photocathodes for water splitting. The alumina-free 100 ALD cycle heterostructures demonstrated no diminishing quality effects, lending themselves well to applications that require direct electrical contact with silicon and benefit from more layers, such as electrodes for high-capacity ion batteries.

Large-scale Synthesis of Aligned MoO 3 Nanobelt Arrays on Silicon Substrates for Nanoenergetics-on-a-chip

Large-scale Synthesis of Aligned MoO<sub>3</sub> Nanobelt Arrays on Silicon Substrates for Nanoenergetics-on-a-chip

Synthesis of Moo (X) Nano-Arrays on Anodic Aluminum Oxide Template by Thermal Diffusion

Gram-Scale Mechanochemical Synthesis of Atom-Layer MoS<sub>2</sub> Semiconductor Electrocatalyst via Functionalized Graphene Quantum Dots for Efficient Hydrogen Evolution

Synthesis of Large-Scaled Moo2 Nanowire Arrays

Self-ordered Mo-oxide Nanotube Arrays as Precursor for Aligned MoOx/MoS2 Core-Shell Nanotubular Structures with a High Density of Reactive Sites

Template-Directed Growth of Well-Aligned MOF Arrays and Derived Self-Supporting Electrodes for Water Splitting

Synthesis of Co(OH)F@Al nanobelt array on various substrates for pyro-MEMS

Scalable Large-Area 2D-MoS2/Silicon-Nanowire Heterostructures for Enhancing Energy Storage Applications

Synthesis and Field-Emission Properties of Aligned MoO3 Nanowires

General Oriented Synthesis of Precise Carbon-Confined Nanostructures by Low-Pressure Vapor Superassembly and Controlled Pyrolysis.

Controlled Growth of Large-Area, Uniform, Vertically Aligned Arrays of α-Fe<sub>2</sub>O<sub>3</sub>Nanobelts and Nanowires

Growth of Large-Area Aligned Molybdenum Nanowires by High Temperature Chemical Vapor Deposition: Synthesis, Growth Mechanism, and Device Application

Interfacial Engineering of 3D Hollow Mo-Based Carbide/Nitride Nanostructures

Controlling the Energetic Characteristics of Micro Energy Storage Device by in Situ Deposition Al/MoO3 Nanolaminates with Varying Internal Structure

Large-Area Nanowire Arrays of Molybdenum and Molybdenum Oxides: Synthesis and Field Emission Properties

Controlled Chemical Vapor Deposition for Synthesis of Nanowire Arrays of Metal–Organic Frameworks and Their Thermal Conversion to Carbon/Metal Oxide Hybrid Materials

Large-area synthesis of nanoscopic catalyst-decorated conductive MOF film using microfluidic-based solution shearing

Soft Nanobrush-Directed Multifunctional MOF Nanoarrays

Scalable continuous flow synthesis of ZnO nanorod arrays in 3-D ceramic honeycomb substrates for low-temperature desulfurization

Room Temperature Ion Beam Synthesis of Ultra-Fine Molybdenum Carbide Nanoparticles: Toward a Scalable Fabrication Route for Earth-Abundant Electrodes