Robust Principal Component Analysis for Iterative Learning Control of Precision Motion Systems with Non-Repetitive Disturbances.

Chung-Yen Lin,Liting Sun,Masayoshi Tomizuka

DOI: https://doi.org/10.1109/acc.2015.7171162

2015-01-01

Abstract:In precision motion systems, the same desired trajectory may have to be repeatedly followed. In such cases, iterative learning control (ILC) is a useful strategy to improve the tracking performance at every iteration cycle. The fundamental assumption is that the error is due to repetitive disturbances. In practice, however, non-repetitive disturbances may also be present, and non-repetitive and repetitive disturbances may possess common frequency components. If non-repetitive disturbance effects enter the learning loop, the performance of ILC may be degraded. This paper studies the problem of robust ILC in the presence of non-repetitive disturbances. An optimization based time-domain Q-filtering technique is presented to prevent non-repetitive disturbances from entering the ILC learning loop. More precisely, we apply the robust principal component analysis (RPCA) to filter out non-repetitive effects from the error signals. The effectiveness of the proposed method is demonstrated on a laboratory setup to emulate precision motion control stages of a wafer scanner. The method is also applicable to a broad class of precision motion systems.