Abstract:Geometric dispersion in integrated microresonators plays a major role in nonlinear optics applications, especially at short wavelengths, to compensate the natural material normal dispersion. Tailoring of geometric confinement allows for anomalous dispersion, which in particular enables the formation of microcombs which can be tuned into the dissipative Kerr soliton (DKS) regime. Due to processes like soliton-induced dispersive wave generation, broadband DKS combs are particularly sensitive to higher-order dispersion, which in turn is sensitive to the ring dimensions at the nanometer-level. For microrings exhibiting a rectangular cross section, the ring width and thickness are the two main control parameters to achieve the targeted dispersion. The former can be easily varied through parameter variation within the lithography mask, yet the latter is defined by the film thickness during growth of the starting material stack, and can show a significant variation (few percent of the total thickness) over a single wafer. In this letter, we demonstrate that controlled dry-etching allows for fine tuning of the device layer (silicon nitride) thickness at the wafer level, allowing multi-project wafers targeting different wavelength bands, and post-fabrication trimming in air-clad ring devices. We demonstrate that such dry etching does not significantly affect either the silicon nitride surface roughness or the optical quality of the devices, thereby enabling fine tuning of the dispersion and the spectral shape of the resulting DKS states.

In Situ Fine Tailoring of Group Velocity Dispersion in Optical Microfibers Via Nanocoatings

Recent Progress in Optical Micro/Nanofiber Technology

Optical microfibers and their applications

Stretch tuning of dispersion in optical microfibers

Fabrication Methods and High-Precision Diameter Control Techniques of Optical Micro-/Nanofibers

Microfiber and Nanofiber Optics: Principles and Applications

Tailoring Nonlinear Processes of Orbital Angular Momentum with Dispersion Engineering in Vortex Fibers

All-optical control of group velocity dispersion in tellurite photonic crystal fibers.

Slow-Light in Photonic Crystal Waveguides/Fibers: Dispersion Tailoring Schemes for Obtaining A High Group Index with Wide Band and Low Gvd

Ultrahigh-Precision Diameter Control of Nanofiber Using Direct Mode Cutoff Feedback

Group Velocity Dispersion of Tapered Fibers Immersed in Different Liquids.

Experimental GVD engineering in slow light slot photonic crystal waveguides

Mode Tailoring in Subwavelength-Dimensional Semiconductor Micro/nanowaveguides by Coupling Optical Microfibers.

Optical nanofibers and spectroscopy

Dispersion Measurement of Ultra-High Numerical Aperture Fibers covering Thulium, Holmium, and Erbium Emission Wavelengths

Tailoring Broadband Kerr Soliton Microcombs via Post-Fabrication Tuning of the Geometric Dispersion

Dispersion of the Nano-Inp Doped Fiber

Dispersion Compensating Properties of Microstructure Fiber

Tailoring Chromatic Dispersion in Chalcogenide–tellurite Microstructured Optical Fiber

An Efficient Method for Supercontinuum Generation in Dispersion-Tailored Lead-Silicate Fiber Taper

Versatile Technique to Functionalize Optical Microfibers Via A Modified Sol-Gel Dip-Coating Method