Abstract:An electrostatically-driven microelectromechanical systems (MEMS) based pyramidal-polygonal micro-scanner is developed for circumferential-scanning endoscopic probes. In this paper, an endoscopic optical coherence tomography (OCT) probe is proposed, which utilizes multiple parallel incident light beams to drastically reduce the required mechanical rotation angle to achieve near 360-degree circumferential scanning. Manual assembly is employed to construct this micro scanner, which combines a silicon micromachined MEMS actuator with four sets of electrostatic comb-drives and a polymer-based pyramidal-polygonal micro-reflector. The pyramidal-polygonal micro-reflector is developed using a combination of high-precision diamond turning and soft lithography molding technologies. The measured average surface roughness and root-mean-square roughness of the diamond turned mold are 7.02 nm and 9.02 nm respectively, and those of the PDMS casted polygon micro-reflector with an Au coating are 48.95 nm and 61.90 nm respectively. Since near-infrared light sources with wavelengths ranging from 930 nm to 1550 nm are typically utilized for OCT applications, the surface roughness of the polygon reflector is better than λ/10 of the operating wavelength indicating that its quality meets the requirement of the OCT bio-imaging applications. An overall optical scan angle of near-360 degrees is demonstrated experimentally at a resonant frequency of 180 Hz with 80 Vpp ac driving voltage. The proposed MEMS scanner offers an alternative solution for circumferential scanning in endoscopic OCT probes owing to its advantages of compact design, fast scanning speed and low operational power consumption.

MEMS-based 3D Confocal Scanning Microendoscope Using MEMS Scanners for Both Lateral and Axial Scan

Confocal microendoscopic 3D imaging using MEMS scanners for both lateral and axial scans

Three-dimensional Confocal Scanning Microscope Using an MEMS Mirror for Lateral Scan and an MEMS Lens Scanner for Depth Scan

3-D Confocal Laser Scanning Microscopy Based on a Full-MEMS Scanning System

A MEMS scanner with lateral and axial scanning capability for dual axes confocal endomicroscopic in-vivo imaging (Conference Presentation)

MEMS Based Side-Viewing Confocal Endomicroscope for Vertical/horizontal Cross-Sectional Imaging

Fiber-optic confocal microscope with an electrothermally-actuated, large-tunable-range microlens scanner for depth scanning

3D Endoscopic Optical Coherence Tomography Based on Rapid-Scanning MEMS Mirrors

A High-Speed Confocal Laser Endomicroscope Using an Electrothermal Mems Mirror Actuated in Linear-Near Resonant Raster Scan

A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications

Targeted sections in either XY or XZ plane with dual-axes confocal endomicroscope (Conference Presentation)

MEMS-based 3D Optical Microendoscopy

A MEMS Lens Scanner Based on Serpentine Electrothermal Bimorph Actuators for Large Axial Tuning.

Polygonal Pyramidal Reflector-Based Micromachined Microscanners for Bioimaging

Electrostatic MEMS Resonating Micro-Polygonal Scanner for Circumferential Endoscopic Bio-Imaging

MEMS Scanning Micromirror for Optical Coherence Tomography.

Three-Dimensional Endoscopic Optical Coherence Tomography By Use Of A Two-Axis Microelectromechanical Scanning Mirror

A 2-Axis MEMS Scanning Micromirror with a 45° Auto-Positioning Mechanism for Endoscopic Probe

Confocal Fluorescence Microendoscopy Using A Digital Micro-Mirror Device

Swept-source Common-Path Optical Coherence Tomography with a MEMS Endoscopic Imaging Probe

Double spiral resonant MEMS scanning for ultra-high-speed miniaturized optical microscopy