Abstract:All‐solid‐state thin film lithium batteries (TFBs) are proposed as the ideal power sources for microelectronic devices. However, the high‐temperature (>500 °C) annealing process of cathode films, such as LiCoO2 and LiMn2O4, restricts the on‐chip integration and potential applications of TFBs. Herein, tunnel structured LixMnO2 nanosheet arrays are fabricated as 3D cathode for TFBs by a facile electrolyte Li+ ion infusion method at very low temperature of 180 °C. Featuring an interesting tunnel intergrowth structure consisting of alternating 1 × 3 and 1 × 2 tunnels, the LixMnO2 cathode shows high specific capacity with good structural stability between 2.0 and 4.3 V (vs. Li+/Li). By utilizing the 3D LixMnO2 cathode, all‐solid‐state LixMnO2/LiPON/Li TFB (3DLMO‐TFB) has been successfully constructed with prominent advantages of greatly enriched cathode/electrolyte interface and shortened Li+ diffusion length in the 3D structure. Consequently, the 3DLMO‐TFB device exhibits large specific capacity (185 mAh g−1 at 50 mA g−1), good rate performance, and excellent cycle performance (81.3% capacity retention after 1000 cycles), outperforming the TFBs using spinel LiMn2O4 thin film cathodes fabricated at high temperature. Importantly, the low‐temperature preparation of high‐performance cathode film enables the fabrication of TFBs on various rigid and flexible substrates, which could greatly expand their potential applications in microelectronics.

Three-dimensional Thin Film for Lithium-Ion Batteries and Supercapacitors.

3D hollow NiCo LDH nanocages anchored on 3D CoO sea urchin-like microspheres: A novel 3D/3D structure for hybrid supercapacitor electrodes

Three-Dimensional Nanoporous Fe2O3/Fe3C-Graphene Heterogeneous Thin Films for Lithium-Ion Batteries

Hydrothermally Formed Three-Dimensional Nanoporous Ni(OH)2 Thin-Film Supercapacitors.

Three-Dimensional Porous Nano-Ni/Fe3o4 Composite Film: Enhanced Electrochemical Performance For Lithium-Ion Batteries

Self-Standing 3D Cathodes for All-Solid-State Thin Film Lithium Batteries with Improved Interface Kinetics

In situ fabrication of three-dimensional, ultrathin graphite/carbon nanotube/NiO composite as binder-free electrode for high-performance energy storage

Fabrication of Three-Dimensionally Interconnected Nanoparticle Superlattices and Their Lithium-Ion Storage Properties.

Atomic Layer Deposition of Hierarchical Cnts@Fepo4 Architecture As A 3d Electrode for Lithium-Ion and Sodium-Ion Batteries

Sub‐Thick Electrodes with Enhanced Transport Kinetics via In Situ Epitaxial Heterogeneous Interfaces for High Areal‐Capacity Lithium Ion Batteries

High-performance Supercapacitor and Lithium-Ion Battery Based on 3D Hierarchical NH4F-induced Nickel Cobaltate Nanosheet-Nanowire Cluster Arrays As Self-Supported Electrodes.

Free-standing Hybrid Films Comprising of Ultra-Dispersed Titania Nanocrystals and Hierarchical Conductive Network for Excellent High Rate Performance of Lithium Storage

2D Nanosheet/3d Cubic Framework Ni-Co Sulfides for Improved Supercapacitor Performance Via Structural Engineering.

Scalable Fabrication Of Mno2 Nanostructure Deposited On Free-Standing Ni Nanocone Arrays For Ultrathin, Flexible, High-Performance Micro-Supercapacitort

Constructing Co<sub>3</sub>O<sub>4</sub> Nanowires on Carbon Fiber Film as a Lithiophilic Host for Stable Lithium Metal Anodes

Tunnel Intergrowth Li x MnO 2 Nanosheet Arrays as 3D Cathode for High‐Performance All‐Solid‐State Thin Film Lithium Microbatteries

3D Hierarchical Oxygen-Deficient AlCoNi-(oxy)hydroxides/N-doped Carbon Hybrids Enable Efficient Battery-Type Asymmetric Supercapacitor

Highly Porous Ti/SnO2 Network Composite Film As Stable Binder-Free Anode Materials for Lithium Ion Batteries

High-Performance Three-Dimensional Nanoporous Nio Film As A Supercapacitor Electrode

3D carbon/cobalt-nickel mixed-oxide hybrid nanostructured arrays for asymmetric supercapacitors.

3D Porous iron oxide/carbon with large surface area as advanced anode materials for lithium-ion batteries