Abstract:Flexible electronics has received widespread concern and research. As a most-fundamental step and component, polymer metallization to introduce conductive electrode is crucial in successful establishment and application of flexible and stretchable electronic system. Ionic polymer-metal composite (IPMC) is such an attractive flexible mechanical sensor with significant advantages of passive and space-discriminative capability. Generally, the IPMC sensor is fabricated by the electroless plating method to form structure of ionic polymer membrane sandwiched with two metallic electrodes. In order to obtain high-quality interface adhesion and conductivity between polymer and metal, the plating process for IPMC sensor is usually time-consuming and uncontrollable and has low reproducibility, which make it difficult to use in practice and in large-scale. Here, a manufacturable method and equipment with short processing time and high reproducibility for fabricating IPMC sensors by in situ plasma etching and magnetron sputtering depositing on flexible substrates is developed. First, the new method shortens the fabrication period greatly from 2 weeks to 2 h to obtain IPMC sensors with sizes up to 9 cm × 9 cm or arrays in various patterns. Second, the integrated operation ensures all sample batch stability and performance repeatability. In a typical IPMC sensor, nearly 200 mV potential signal due to ion redistribution induced by bending strain under 1.6% can be produced without any external power supply, which is much higher than the traditional electroless plating sensor. This work verified that the in situ plasma etching and magnetron sputtering deposition could significantly increase the interface and surface conductivity of the flexible devices, resulting in the present high sensitivity as well as linear correlation with strain of the IPMC sensor. Therefore, this introduced method is scalable and believed to be used to metalize flexible substrates with different metals, providing a new route to large-scale fabrication of flexible devices for potential wearable applications in real-time monitoring human motion and human-machine interaction.

Polymer-assisted Metal Deposition (PAMD): a Full-Solution Strategy for Flexible, Stretchable, Compressible, and Wearable Metal Conductors.

Polymer‐Assisted Metal Deposition (PAMD) for Flexible and Wearable Electronics: Principle, Materials, Printing, and Devices

Large-Scale Fabrication of High-Performance Ionic Polymer-Metal Composite Flexible Sensors by in Situ Plasma Etching and Magnetron Sputtering

Directly Electroplated Metallization on Flexible Substrates Based on Silver Nanowire Conductive Composite for Wearable Electronics

Electroless Deposition Metals On Poly(Dimethylsiloxane) With Strong Adhesion As Flexible And Stretchable Conductive Materials

Highly Stable and Stretchable Conductive Films through Thermal‐Radiation‐Assisted Metal Encapsulation

A facile and scalable patterning approach for ultrastretchable liquid metal features

Selective Electroless Metallization of Micro- and Nanopatterns via Poly(dopamine) Modification and Palladium Nanoparticle Catalysis for Flexible and Stretchable Electronic Applications.

A stretchable and printable PEDOT:PSS/PDMS composite conductors and its application to wearable strain sensor

Fully solution processed liquid metal features as highly conductive and ultrastretchable conductors

Highly stretchable, sensitive, and flexible strain sensors based on Ag@Cu/PDMS composites

Facile and Rapid Method for Fabricating Liquid Metal Electrodes with Highly Precise Patterns via One‐Step Coating

A printable and flexible conductive polymer composite with sandwich structure for stretchable conductor and strain sensor applications

Three-dimensional compressible and stretchable conductive composites

Highly Stretchable Conductor by Self-Assembling and Mechanical Sintering of a 2D Liquid Metal on a 3D Polydopamine-Modified Polyurethane Sponge.

Surface‐Engineered Liquid Metal Particles for Printing Stretchable Conductive Composites with Enhanced Stability Under Different Strain Rates

Introduction of a Chemical-Free Metal PDMS Thermal Bonding for Fabrication of Flexible Electrode by Metal Transfer onto PDMS

Design and Fabrication of Metallic-Conductive Polymer-Based Hybrid Film Interconnections for Stretchable Electronic Devices

Self‐Assembly Enabled Printable Asymmetric Self‐Insulated Stretchable Conductor for Human Interface

Efficient and Simple Fabrication of High-Strength and High-Conductivity Metallization Patterns on Flexible Polymer Films

Fabrication of a flexible and stretchable three-dimensional conductor based on Au–Ni@graphene coated polyurethane sponge by electroless plating