Abstract:Optical coherence tomography (OCT) is a medical optical imaging technique that can achieve high-resolution 3D images (1 15 m)1 by detecting infrared light scattered by body tissue. It has an imaging depth range of about 3mm in highly-scattered tissue and has already been widely used for external imaging, e.g., for eye diseases and skin cancer diagnosis. It would be useful to apply OCT to internal imaging, since about 85% of all cancers originate from the surface layers of internal organs. As these layers are within its imaging depth range, OCT can detect cancer at an early stage as well as precisely determine tumor margins. However, it is very challenging to apply this technique to internal organs because of stringent size and imaging time constraints. One promising approach is to use microelectromechanical systems (MEMS) scanning micromirrors. Several research groups have demonstrated actuation mechanisms to generate rotational scanning for micromirrors for endoscopic OCT. Among them, electrostatic micromirrors can be very fast and consume low power, but the angular scan range is limited and the required driving voltage is too high ( 100V) to be safe for patients. Electromagnetic micromirrors have also been used for OCT probes, but the assembly process is complicated and the potential electromagnetic interference caused by the use of permanent magnets is another concern. Another problem these mirrors share is that they all have a small fill factor (the ratio of the mirror area to the device area). For a given resolution, the required mirror area is fixed. Thus, a small fill factor leads to a large device, which in turn increases the imaging probe size. Electrothermal mirrors, on the other hand, can achieve a large scan range at low drive voltage, but most of them have large initial tilt angles and significant shift of rotation centers, causing serious optical alignment and coupling problems. Figure 1. Scanning electron micrograph of an electrothermal MEMS mirror. Chip size: 2mm 2mm.

Microelectromechanical Systems Scanning-Mirror-based Handheld Probe for Fluorescence Molecular Tomography.

Miniature fluorescence molecular tomography (FMT) endoscope based on a MEMS scanning mirror and an optical fiberscope.

Handheld Miniature Probe Integrating Diffuse Optical Tomography with Photoacoustic Imaging Through a MEMS Scanning Mirror.

A Customized Two Photon Fluorescence Imaging Probe Based on 2D Scanning MEMS Mirror Including Electrothermal Two-Level-Ladder Dual S-Shaped Actuators

A Handheld Fluorescence Molecular Tomography System for Intraoperative Optical Imaging of Tumor Margins.

Microfabricated Endoscopic Probe Integrated MEMS Micromirror for Optical Coherence Tomography Bioimaging

3D Endoscopic Optical Coherence Tomography Based on Rapid-Scanning MEMS Mirrors

Prototype Study on a Miniaturized Dual-Modality Imaging System for Photoacoustic Microscopy and Confocal Fluorescence Microscopy

MEMS Scanning Micromirror for Optical Coherence Tomography.

Development of an electrothermal MEMS mirror based two-photon microscopy probe

Miniature endoscopic optical coherence tomography probe employing a two-axis microelectromechanical scanning mirror with through-silicon vias.

MEMS micromirror integrated endoscopic probe for optical coherence tomography bioimaging

A miniature fluorescence molecular tomography endoscope

Confocal microendoscopic 3D imaging using MEMS scanners for both lateral and axial scans

3-D Image of Near-infrared Fluorescent Probe in Tissue-like Solution.

Developing a Free-Space Fluorescence Molecular Tomography System

Three-Dimensional Optical Coherence Tomography Based on a High-Fill-Factor Microelectromechanical Mirror

Confocal Fluorescence Microendoscopy Using A Digital Micro-Mirror Device

Optical Micro-Endoscopes for 3D In-Vivo Imaging

Miniaturized all-optical photoacoustic microscopy based on microelectromechanical systems mirror scanning.

MEMS-based 3D Confocal Scanning Microendoscope Using MEMS Scanners for Both Lateral and Axial Scan