Abstract:In this chapter, we outline some of the properties of X-ray microscope systems in operation today, and highlight some of their present applications. We will not discuss the history of X-ray microscopes prior to about 1975 but instead refer the reader to a series of conference proceedings known as “X-ray Optics and X-ray Microanalysis,” which began in 1956. Originally these had valuable material on X-ray microscopy but this diminished after about 1970. The first five were at Cambridge (1956) (Cosslett et al., 1957), Stockholm (1959) (Engström et al., 1960), Stanford (1962) (Pattee et al., 1963), Orsay (1965) (Castaing et al., 1966) and Tubingen (1968) (Molenstedt et al., 1969). We also recommend the historical perspectives by A. Baez (Baez, 1989, 1997) and the book by Cosslet and Nixon (1960). There is a recognisable thread of continuity between today’s status of the field and efforts that began slowly around 1975 (Niemann et al., 1976; Parsons, 1978; Kirz and Sayre, 1980c; Parsons, 1980) and blossomed with the availability of synchrotron light sources and nanofabrication technologies; this thread can be traced in part via the proceedings of another conference series that began in 1984 (Schmahl and Rudolph, 1984a) and has continued until today (Sayre et al., 1988; Michette et al., 1992; Aristov and Erko, 1994; Thieme et al., 1998b; Meyer-Ilse et al., 2000b; Susini et al., 2003). Zone-plate X-ray microscopes now exist at roughly two dozen international synchrotron radiation research centers (see Table 13–3), and commercial lab-based instruments are also available. Three types are in especially widespread use. Transmission X-ray microscopes (TXMs) specialize in the rapid acquisition of 2D images using high flux sources, and in the collection of tilt sequences of projection images for 3D imaging by tomography. Scanning transmission X-ray microscopes (STXMs) specialize in the acquisition of reduced dose images and point spectra with high energy resolution for elemental and chemical state mapping, and require high source brightness. Scanning fluorescence X-ray microprobes (SFXMs) are similar to STXMs except that fluorescence X-rays are collected by energy-resolving detectors for trace element mapping. All three approaches are now working below 100 nm resolution, to the point of reaching 15 nm resolution in some demonstrations (Chao et al., 2005). While many of the new technical developments continue to be pursued by specialists in X-ray optics and microscopy, much of presentday activity comes from scientists in other fields of research who are using X-ray microscopes to address their particular questions. This chapter is mainly aimed at scientists from the latter group as well as those from the other communities represented in the content of this series of books.

High-speed X-ray Microscopy by Use of High-Resolution Zone Plates and Synchrotron Radiation.

High resolution X-ray microscopy and its new developments

High-Resolution Scanning X-ray Diffraction Microscopy

Fast X-ray micro-tomography for low-Z materials

X-ray microscopy instrumentation developments at NSLS-II: recent progress and future directions

Application of synchrotron radiation in biological imaging analysis

A study of structural effects on the focusing and imaging performance of hard X‐rays with 20–30 nm zone plates

Synchrotron-based X-ray microscopy for sub-100 nm resolution cell imaging

Synchrotron‐Based X‐ray Microscopy for Nanoscale Bioimaging

A Compound Kinoform/Fresnel Zone Plate Lens with 15 Nm Resolution and High Efficiency in Soft X-Ray.

Principles and Applications of Zone Plate X-Ray Microscopes

A dielectric Kinoform zone plate with 15 nm resolution and high efficiency for soft X-ray optics

Synchrotron Radiation X-ray Imaging with Large Field of View and High Resolution Using Micro-Scanning Method.

Use of Fractal Zone Plates for Transmission X-ray Microscopy

High Resolution Hard X-Ray Microscope On A Second Generation Synchrotron Source

Three Dimensional Imaging of Biological Samples and Nano-materials Using Soft X-ray Microscopy

Principle and Advancements of X Ray Phase Contrast Micro-imaging

High-efficiency focusing and imaging by dielectric kinoform zone plate lenses with soft X-rays.

Development of A Hard X-Ray-Imaging Microscope

High-speed Super-Resolution Structured Illumination Microscopy with a Large Field-of-view

A 30 Nm-Resolution Hard X-ray Microscope with X-ray Fluorescence Mapping Capability at BSRF.