Abstract:Friction-induced surface amorphization of silicon is one of the most important surface wear and damage forms, changing the material properties and harming the reliability of silicon-based devices. However, knowledge regarding the amorphization mechanisms as well as the effects of temperature is still insufficient, because the experimental measurements of the crystal-amorphous interface structures and evolutions are extremely difficult. In this work, we aim to fully reveal the temperature dependence of silicon amorphization behaviors and relevant mechanisms by using reactive molecular dynamics simulations. We first show that the degree of amorphization is suppressed by the increasing temperature, contrary to our initial expectations. Then, we further revealed that the observed silicon amorphization behaviors are attributed to two independent processes: One is a thermoactivated and shear-driven amorphization process where the theoretical amorphization rate shows an interesting valley-like temperature dependence because of the competition between the increased thermal activation effect and the reduction of shear stress, and another one is a thermoactivated recrystallization process which shows a monotonically increasing trend with temperature. Thus, the observed reduction of amorphization with temperature is mainly due to the recrystallization effect. Additionally, analytical models are proposed in this work to describe both the amorphization and the recrystallization processes. Overall, the present findings provide deep insights into the temperature-dependent amorphization and recrystallization processes of silicon, benefiting the further development of silicon-based devices and technologies.

Surface and Grain-Boundary Amorphization: Thermodynamic Melting of Coesite below the Glass Transition Temperature.

Pressure-induced Amorphization of Crystalline Silica

Pressure-induced Structural Modulations in Coesite

Microscopic Hardness and Dynamic Mechanical Analysis of Rapidly Solidified Fe-based Amorphous Alloys

Melting and Subsolidus Relations of SiO2 at 9–14 GPa

Thermal structural disorder and melting transition in high-angle grain-boundary: a molecular-dynamics study

Highly choreographed atomic motion and mechanism of interface amorphization

Melting and Pressure-Induced Amorphization of Quartz

Dynamic Crystallization Process in A Supercooled Liquid Region of Cu40ti30ni15zr10sn5 Amorphous Alloy

Microscopic mechanisms of pressure-induced amorphous-amorphous transitions and crystallisation in silicon

Effect of Si–OH on the Transformation of Amorphous SiO2 to Coesite

Pressure-induced Crystallization of Amorphous SiO2with Silicon–hydroxy Group and the Quick Synthesis of Coesite under Lower Temperature

Microstructural Observations of Α-Quartz Amorphization

Interfacial Reaction, Amorphization Transition, and Associated Elastic Instability Studied by Molecular Dynamics Simulations in the Ni-Ta System

Some IR features of SiO4 and OH in coesite, and its amorphization and dehydration at ambient pressure

On Structural Rearrangements Near the Glass Transition Temperature in Amorphous Silica

Structural Transition of Nanometer SiO2 Powders under High Pressure and High Temperature

Compressibility and Pressure-Induced Amorphization of Guest-Free Melanophlogite: an In-Situ Synchrotron X-ray Diffraction Study

Temperature-Dependent Friction-Induced Surface Amorphization Mechanism of Crystal Silicon

Polymorphic phase transition mechanism of compressed coesite

Crystal melting influenced by particle cooperativity of the liquid