Sol-gel derived PMN-PT thick film for high frequency ultrasound transducer applications

b p zhu,q f zhou,k kirk shung,q wei,y h huang

DOI: https://doi.org/10.1109/ULTSYM.2009.5441779

2009-01-01

Abstract:Piezoelectric 0.65Pb(Mg1/3Nb2/3)O3-0.35PbTiO3 thick film with the thickness around 12 ¿m has been deposited on the platinum bufered Si substrate via a composite spin-coating method. The X-ray diffraction analysis and scanning electron microscopy revealed that the film was in the well-crystallized perovskite phase and crack-free. The separation of films from the substrate was achieved using a wet chemical method. The lifted-off film exhibited good dielectric and ferroelectric properties. At 1 kHz, the dielectric constant and the loss were 3326 and 0.037, respectively, while the remnant polarization was 30.0 ¿C/cm2. A high frequency single element acoustic transducer fabricated with this film showed a bandwidth at -6 dB of 63.6% at 110 MHz.