Generation of Large-volume Plasma Under Low Air-pressure and Study of Its Electrical Characteristics
Bingzhe WANG,Zhen LIU,Yifan HUANG,Keping YAN
DOI: https://doi.org/10.13336/j.1003-6520.hve.2014.07.033
2014-01-01
Abstract:Large-volume uniform plasma generated under low pressure has promising application prospects in areas like material processing, activation, and regeneration of catalysts, and so on. In this paper, uniform plasma of a maximum volume of about 21 L was generated by using a bipolar pulsed power source(50~104 Hz, peak voltage less than 3 kV, pulse width less than 50 μs) and parallel plate electrodes, under pressure of 10~100 Pa, in a homemade vacuum reactor. Measuring the time-varied voltage and current of the reactor during discharge, we obtained the inception voltage of a uniform discharge,and found the relationship between power and parameters, such as pressure, electrode distance, electrode area, pulse frequency, etc., under several kinds of medium like air, oxygen, and argon. The results reveal that large-volume uniform plasma with a maximum volume of 21 L has been generated under all 3 kinds of media, uniformity and stability of the discharge are better when pressure is below 50 Pa. Inception voltage increases while pressure and electrode spacing increase, respectively. Power density stays the same when the area of the electrode changes, and increases as the pressure, pulse frequency, and applied voltage increase, and as the electrode spacing decreases.