Dense Plasmas in Magnetic Traps: Generation of Focused Ion Beams with Controlled Ion-to-Neutral Flux Ratios

Oleg Baranov,Xiaoxia Zhong,Jinghua Fang,Shailesh Kumar,Shuyan Xu,Uros Cvelbar,Davide Mariotti,Kostya Ostrikov
DOI: https://doi.org/10.1109/tps.2013.2295626
IF: 1.368
2014-01-01
IEEE Transactions on Plasma Science
Abstract:Customized magnetic traps were developed to produce a domain of dense plasmas with a narrow ion beam directed to a particular area of the processed substrate. A planar magnetron coupled with an arc discharge source created the magnetic traps to confine the plasma electrons and generate the ion beam with the controlled ratio of ion-to-neutral fluxes. Images of the plasma jet patterns and numerical vizualizations help explaining the observed phenomena.
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