Abstract:Notice of Retraction After careful and considered review of the content of this paper by a duly constituted expert committee, this paper has been found to be in violation of IEEE's Publication Principles. We hereby retract the content of this paper. Reasonable effort should be made to remove all past references to this paper. The presenting author of this paper has the option to appeal this decision by contacting TPII@ieee.org. Simulation plays an important role in researching, developing and testing Integrated Circuit (IC) manufacturing equipments. It is possible to test most of the functions and performance on simulation platform, and simulation platform can be used to verify the consistency of the process and the reliability of IC manufacturing equipment at the same time. In order to achieve a class of general and configurable simulation platform, which is based on SEMI standard. This paper describes component simulation platform framework and design methodology. Equipment maintenance time could be reduced and equipment utilization could be maximized with this simulation system. As a case study, the gas deliver subsystem test simulation is investigated on the designed component simulation platform, the simulation results show that the component simulation platform is helpful for rapid installation of IC equipment and verify its functions due to the automotic configuration of the component simulation middleware.

Notice of Retraction: A Dynamic Simulation of Force in the Movement of Ameba Based on Cosmos

Retracted: Motion Control Analysis of Tennis Robot Based on Ant Colony Algorithm

Retracted: Active Compliance Control System for Intelligent Inspection Robot in Power Room

Retracted: A Table Tennis Motion Correction System Based on Human Motion Feature Recognition

Notice of Retraction: Design of Component Simulation Platform for Integrated Circuit Manufacturing Equipments

Retracted: Physical Education Teaching in Colleges and Universities Assisted by Virtual Reality Technology Based on Artificial Intelligence

Notice of Retraction The risk management study on the environment emergency response activity

Retracted: Scene Construction and Application of Panoramic Virtual Simulation in Interactive Dance Teaching Based on Artificial Intelligence Technology

Retracted: Urban Road Landscape Design and Digital Twin Simulation Modeling Analysis

Retracted: Sports Training Strategy and Interactive Control Method Based on Digital Twins and Wireless Sensor Networks

Retracted: Optimization of IoT-Based Motion Intelligence Monitoring System

Retracted: Motion Trajectory Error of Robotic Arm Based on Neural Network Algorithm

Retracted: A Recommended Approach to Classical Literature and Art Exhibition Activities Oriented towards Interactive Modelling

Retracted: Art Product Recognition Model Design and Construction of VR Model

Retracted: Dynamic Modeling and Analysis of Micro-Video Teaching System Based on Cloud Computing in College English Teaching

Notice of Retraction Frontier research on building information technology capability: An ambidexterity perspective

Retracted: Dynamical Alert of Thought and Politics Teaching Based on the Long- and Short-Term Memory Neural Network

Retracted: Application of Compound Control Method Based on WOA in Micropositioning Stage of SICM

Retracted: Intelligent Clothing Design and Data Acquisition under the Scientific Graphics Programming Combined with Wearable Multisensor

Notice of RetractionReforms of Fundamental Chemistry Experiment Education in Research University

Retracted: Human Motion Representation and Motion Pattern Recognition Based on Complex Fuzzy Theory