Next Promising P-Type FinFET Devices Without or with Cobalt-Silicide Applied to the Gate

Hsin-Chia Yang,Guo-Wei Wu,Wen-Shiang Liao,Wei-Yen Peng,Sung-Ching Chi,Mu-Chun Wang,Shea-Jue Wang
DOI: https://doi.org/10.1109/inec.2013.6466085
2013-01-01
Abstract:The leakage current is suppressed on 3-D structural fin-like channels of FinFET as the sizes of devices get substantially shrunk. The devices with channel width/length (0.12μm/ 0.10μm) are focused on and the baseline device is taken to be 15KeV phosphorous ions (the precursor PH3) for N-well Vt implant and heavily doped poly-silicon for the gate. One is thus intrigued in what if the Vt implant energy is changed to 20KeV or the gate poly-silicon is fully replaced with cobalt silicide.
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