Miniature Photoacoustic Imaging Probe Using MEMS Scanning Micromirror

Wenjun Liao,Wenjing Liu,Jingjing Sun,Yiping Zhu,Lei Wu,Huikai Xie,Lei Xi,Huabei Jiang
DOI: https://doi.org/10.1109/omems.2011.6031113
2011-01-01
Abstract:This paper presents the design and characterization of an electrothermally actuated high-fill-factor tip-tilt-piston (TTP) micromirror and its application to three-dimensional (3D) photoacoustic imaging (PAI). The micromirror chip is 2mm × 2mm. It has large scan range (>;25°) at low driving voltage (~4V) and can perform fast raster scanning. A miniature PAI probe with a diameter of 11.5 mm has been developed. The 3D images of in vivo human blood vessels are successfully obtained using this MEMS-based PAI system.
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