Theoretical Study of the Output Energy for Various MEMS Based Electrostatic Mechanisms

Ye Mei Lim,Bin Yang,Rama Krishna Kotlanka,Chun Huat Heng,Jin Xie,Min Tang,Johnny He Han,Hanhua Feng,Chengkuo Lee

DOI: https://doi.org/10.1109/icset.2008.4747069

2008-01-01

Abstract:This paper presents a comparison of the energy harvesting capabilities of 3 different electrostatic mechanisms based on MEMS (Microelectromechanical System) structures which are designed and operated in idea vacuum. The 3 mechanisms that will be compared are the in-plane overlap, in-plane gap closing and out-of-plane gap closing mechanisms. Firstly, it was found that the in-plane gap closing mechanism potentially has the highest output energy amongst the 3 different mechanisms. Secondly, the best energy output for the in-plane gap closing mechanism is approximately 1.8 times that of the out-of-plane gap closing mechanism for load volumes between 5mm(3) and 50mm(3).