Synthesis and Characterization of Dandelion-Shaped SiCN Rods

Yanni Qian,Xueming Ma,Wenjuan Cheng
DOI: https://doi.org/10.1109/inec.2008.4585488
2008-01-01
Abstract:Assited by Co as catalyst, an interesting structure, dandelion-shaped SiCN rods, was synthesized using microwave plasma chemical vapor deposition method with gas mixtures of CH4, H2 and N2 as precursors and Si chips inserted in the sample holder at symmetrical positions around the specimen as additional Si sources. Scanning electron microscopy shows each rod has not only a column about 0.4~0.8 mum in diameter and about 10~20 mum in length, but also a ~2 mum sized ball-like tip, from which nanowiskers of 0.3 mum long with 20~30 nm in diameter were formed. The samples are atomic-level hybrids composed of Si, C and N atoms. Two strong peaks (3.25 and 2.84 eV) were observed from photoluminescence spectroscopy at room temperature, indicating the dandelion-shaped SiCN rods have potential application in optoelectronic devices.
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