3-Axes Tactile Sensor with Tunable Sensing Range

Chih-Chieh Wen,Chia-Min Lin,Weileun Fang
DOI: https://doi.org/10.1109/sensor.2007.4300419
2007-01-01
Abstract:This study has successfully demonstrated a novel 3-axes polymer tactile sensor with built-in piezoresistive sensors. The sensor consists of polymer membrane and four sensing cantilevers with piezoresistors on both top and side walls to measure the in-plane and out-of-plane loads. The fabrication process allows the changing of polymer membrane material easily. As a result, the sensing range of the present 3 D tactile sensor is easily tuned by varying the polymer material.
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