Magnetic Interation Effect in Spittered Nd/sub 2/fe/sub 14/B Films

Tsai, J.L.,Huang, E.Y.,Chin, T.S.,Chen, S.K.
DOI: https://doi.org/10.1109/intmag.1997.597771
1997-01-01
Abstract:Nd-Fe-B permanent magnets have been extensively studied during the past years. The oriented Nd-Fe-B films were first prepared by Cadieu et al. in 1986 [l]. Nowadays, the sputtering method has been widely used to prepare Nd-Fe-B films. In addition to single layer, multilayer films were also studied by many investigators, such as multilayers with buffer layer of Ag or Fe [2]. In this paper, we are interested in determining the magnetic interaction of Nd-Fe-B films with an underlayer of Ta that was deposited on Si or A h 0 3 substrate, respectively.
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