Abstract:Carbon nanotubes (CNT) have been developed in recent decades for nanodevices such as nanoradios, nanogenerators, carbon nanotube field effect transistors (CNTFETs) and so on, indicating that the application of CNTs for nanoscale electronics may play a key role in the development of nanotechnology. Nanorobotics manipulation systems are a promising method for nanodevice construction and assembly. For the purpose of constructing three-dimensional CNTFETs, a nanorobotics manipulation system with 16 DOFs was developed for nanomanipulation of nanometer-scale objects inside the specimen chamber of a scanning electron microscope (SEM). Nanorobotics manipulators are assembled into four units with four DOFs (X-Y-Z-θ) individually. The rotational one is actuated by a picomotor. That means a manipulator has four DOFs including three linear motions in the X, Y, Z directions and a 360-degree rotational one (X-Y-Z-θ stage, θ is along the direction rotating with X or Y axis). Manipulators are actuated by picomotors with better than 30 nm linear resolution and <1 micro-rad rotary resolution. Four vertically installed AFM cantilevers (the axis of the cantilever tip is vertical to the axis of electronic beam of SEM) served as the end-effectors to facilitate the real-time observation of the operations. A series of kinematic derivations of these four manipulators based on the Denavit-Hartenberg (D-H) notation were established. The common working space of the end-effectors is 2.78 mm by 4.39 mm by 6 mm. The manipulation strategy and vision feedback control for multi-manipulators operating inside the SEM chamber were been discussed. Finally, application of the designed nanorobotics manipulation system by successfully testing of the pickup-and-place manipulation of an individual CNT onto four probes was described. The experimental results have shown that carbon nanotubes can be successfully picked up with this nanorobotics manipulation system.

Development and optimum design of a mobile manipulator for CBRN sampling

Dynamic Modeling and Analysis for Coupling Processing 6-DOF 3 P3 R Manipulator

Dynamical Obstacle Avoidance of Task- Constrained Mobile Manipulation Using Model Predictive Control

Optimal Base Placement And Motion Planning For Mobile Manipulators

Development of a redundant anthropomorphic hydraulically actuated manipulator with a roll-pitch-yaw spherical wrist

A Novel Flexure-Based 3-DOF Micro-Parallel Manipulator with a Gripper for Micro/nano Manipulation

Design and Analysis of a Whole-Body Controller for a Velocity Controlled Robot Mobile Manipulator

The structure design and kinematics analysis of the manipulator for the upper port remote maintenance in DEMO

Manipulability Optimization Control of a Serial Redundant Robot for Robot-assisted Minimally Invasive Surgery

Deployment of an autonomous mobile manipulator at MBZIRC

A Holistic Approach to Reactive Mobile Manipulation

Mobile Manipulation Platform for Autonomous Indoor Inspections in Low-Clearance Areas

An Architecture for Reactive Mobile Manipulation On-The-Move

Design and development of a soft robotic manipulator

Design and Experimental Study of a Novel 7-DOF Manipulator for Transrectal Ultrasound Probe

A Small Opening Workspace Control Strategy for Redundant Manipulator Based on RCM Method

Design and Analysis of 7-DOF Cable-Driven Manipulator

Workspace Description and Evaluation of Master-Slave Dual Hydraulic Manipulators

Kinematic Optimization of a Continuum Surgical Manipulator

A nine-degree-of-freedom modular redundant robotic manipulator: Development and experimentation

Mechatronic Development and Vision Feedback Control of a Nanorobotics Manipulation System inside SEM for Nanodevice Assembly