Shuffled Frog-Leaping Algorithm Based Batch Scheduling in Semiconductor Furnace

Ye Xu,Ling Wang,Sheng-Yao Wang,Jin Deng
DOI: https://doi.org/10.1109/wcica.2014.7053155
2014-01-01
Abstract:An effective shuffled frog-leaping algorithm (SFLA) is proposed in this paper to solve the batch scheduling problem in semiconductor furnace. To map integer matrix based individuals to feasible schedules, a new bi-sequence based decoding method is presented. To balance exploration and exploitation capabilities, a crossover scheme and a local search operator for the specific problem are incorporated in the framework of the SFLA. Finally, numerical testing results are provided based on three instances and a real case. The comparisons demonstrate the effectiveness of the proposed algorithm.
What problem does this paper attempt to address?