An Integrated Flexible Harvester Coupled Triboelectric and Piezoelectric Mechanisms Using PDMS/MWCNT and PVDF

Zhu, Y.,Yang, b.,liu, J.,Wang, X.
DOI: https://doi.org/10.1109/JMEMS.2015.2404037
2015-01-01
Abstract:This paper describes the design, fabrication, and characterization of an integrated flexible energy harvester with triboelectric and piezoelectric hybrid mechanisms. The double-side tribological layers are polydimethylsiloxane (PDMS) and PDMS/multiwall carbon nanotube (MWCNT) carbon nanotube, respectively, which works at triboelectric mechanism. The Polyvinylidene Fluoride (PVDF) film with double-side Al electrodes is bonded with PDMS layer to form the functional layer of piezoelectric harvester. The dimension of the fabricated prototype is 15 mm x 10 mm x 5 mm. The experiments at the varied frequencies from 1 to 5 Hz are conducted to characterize the performance of the harvester under the tapping force of 5 N. The output voltages from triboelectric and piezoelectric harvester are 30 and 6.5 V at 5 Hz, respectively. The maximum output power from triboelectric one is ~3.4 μW under the matched resistance of 15 MΩ. While the maximum power from piezoelectric one was ~0.12 μW at 1 MΩ. [2015-0003]
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